A NichePSO Algorithm Based Method for Process Window Selection

نویسندگان

  • Wenqi Li
  • Yiming Qiu
  • Lei Wang
  • Qidi Wu
چکیده

Process parameter window selection in semiconductor manufacturing field is usually the problem to find out the ranges of input parameters that meet production requirements, which requires allocating optima of a multimodal function efficiently. To achieve good results under the conditions of multimodal model and process control requirement, a NichePSO algorithm based method for parameter window selection is presented in this paper. Both simulation results and production validation data indicate it is an effective method for process parameter window selection.

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تاریخ انتشار 2011